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Cleaning Services

Cleaning

Chem Clean (HV, UHV)

Chemical cleaning for high vacuum parts is crucial to maintain their performance and prevent contamination and we are providing our customer the service to clean the semiconductor chamber parts and package it according to their requirements.

Ultra Precision Cleaning

At SMARTT, we have the know-how to perform Ultra Precision Cleaning for semiconductor chamber parts and this will help our customer to minimize their chamber downtime and maintaining performance.

Automated Cleaning Line

Chem Clean (HV, UHV)

Chemical cleaning for high vacuum parts is crucial to maintain their performance and prevent contamination and we are providing our customer the service to clean the semiconductor chamber parts and package it according to their requirements.

Ultra Precision Cleaning

At SMARTT, we have the know-how to perform Ultra Precision Cleaning for semiconductor chamber parts and this will help our customer to minimize their chamber downtime and maintaining performance.

ICP Mass Spectrometer

Spin Polisher

Drying Oven with flow meter for N2 purge
Range: 5 to 50L/min

Multiple Cleaning Lines
in Class 1K and 10K Cleanrooms

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