Chemical cleaning for high vacuum parts is crucial to maintain their performance and prevent contamination and we are providing our customer the service to clean the semiconductor chamber parts and package it according to their requirements.
Ultra Precision Cleaning
At SMARTT, we have the know-how to perform Ultra Precision Cleaning for semiconductor chamber parts and this will help our customer to minimize their chamber downtime and maintaining performance.
Automated Cleaning Line
Multiple Cleaning Lines in Class 1K and 10K Cleanrooms
Drying Oven with flow meter for N2 purge Range: 5 to 50L/min
Spin Polisher
ICP Mass Spectrometer
Automated Cleaning Line
Chem Clean (HV, UHV)
Chemical cleaning for high vacuum parts is crucial to maintain their performance and prevent contamination and we are providing our customer the service to clean the semiconductor chamber parts and package it according to their requirements.
Ultra Precision Cleaning
At SMARTT, we have the know-how to perform Ultra Precision Cleaning for semiconductor chamber parts and this will help our customer to minimize their chamber downtime and maintaining performance.
ICP Mass Spectrometer
Spin Polisher
Drying Oven with flow meter for N2 purge Range: 5 to 50L/min
Multiple Cleaning Lines in Class 1K and 10K Cleanrooms